Specular Reflectance

SLM-907 Specular reflectance accessory for V-700

The SLM-907 specular reflectance accessory measures the relative reflectance of a sample in comparison with the reflected light from an aluminum-deposited plane mirror as a reference. This accessory is used for the reflectance measurement of sample types such as: metal-deposited films, metal plating, and other thin films. Film thickness can be calculated using the optional film thickness analysis program.

Specular Reflectance Accessory Specifications

Wavelength range

250 to 1000 nm (V-730 UV/VIS spectrophotometer)
200 to 900 nm (V-750/760 UV/VIS spectrophotometer)
200 to 2700 nm (V-770 UV/VIS/NIR spectrophotometer)
200 to 1600 nm (V-780 UV-Vis/NIR spectrophotometer)

Sample size

Sample

Minimum 10 x 10 mm
Maximum 100 x 120 mm

Reference

Minimum 10 x 10 mm
Maximum 20 x 20 mm

Beam port diameter

7 mm (4 mm, 2 mm as option)

Angle of Incidence

Approx. 5°

Reflection reference

Aluminum-deposited plane mirror (Standard mirror)

Optional accessories:

  • Polarizer (GPH-506)
  • Application program (Film thickness calculation program, etc.)
  • Sample stage with 2-mm-dia. port
  • Sample stage with 4-mm-dia. port

MSK-001 Sample stage with 2-mm-dia. port

MSK-002 Sample stage with 4-mm-dia. port

MSK-001 Sample stage with 2-mm-dia.port

MSK-002 Sample stage with 4-mm-dia.port

Diameter of port:
Sample Size:

2mm
Minimum 3×3 mm
Maximum 50×50 mm

Diameter of port:
Sample size:

4mm
Minimum 5×5 mm

Maximum 50×50 mm

SLM-908 Specular reflectance accessory for V-750/760/770/780 (for 6-inch Silicon Wafers)